1 scope of this manual, 1 introduction, 2 references to other applicable documents – Bronkhorst FLOW-SMS Series User Manual
Page 5: 1scope of this manual
BRONKHORST HIGH-TECH B.V.
1
Scope of this manual
1.1 Introduction
This manual covers the FLOW‐SMS series, Bronkhorst High‐Tech’s light weight, modular gas delivery system. It
handles the general instructions needed for the surface mount components, i.e. digital mass flow / pressure
meters and controllers, control valves, shut‐off valves and filters, as well as the manifold components such as
mixing and distribution chambers, support rails and adapter plates.
FLOW‐SMS systems are assembled according to customer’s specifications. The ranges for the flow sensor can be
selected between approx. 5 ml
n
/min up to 50 l
n
/min or even higher. In case a pressure sensor is included, the
pressure range can be chosen between 0‐100 mbar and 0‐10 bar absolute or gauge. Depending on the application
the customer may prefer a system with face seal fittings, compression type couplings, or flanges according to
customers’ specification. On request, the system will be assembled, tested, and packaged in a cleanroom.
Example:
1.2
References to other applicable documents
FLOW‐SMS instruments have modular instruction manuals consisting of:
-
FLOW‐SMS series (document nr. 9.17.057)
-
Operation instructions digital instruments (document nr. 9.17.023)
-
Optional fieldbus/interface descriptions:
-
FLOW‐BUS interface (document nr. 9.17.024)
-
PROFIBUS
®
‐DP interface (document nr. 9.17.025)
-
DeviceNet
TM
interface (document nr. 9.17.026)
-
RS232 interface with FLOW‐BUS protocol (document nr. 9.17.027)
-
Modbus interface (document nr. 9.17.035)
-
EtherCAT interface (document nr. 9.17.063)
-
Hook‐up diagrams for analog, RS232 and fieldbus operation
-
Dimensional drawing (document nr. 7.05.813)
9.17.057
page 5
These documents, except for the dimensional drawing, can be found in PDF format on the CD
“Documentation and software tools”, furnished with the delivered instruments. The documents are
also available on:
or can be applied for at our local sales & service representatives