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Bronkhorst FLOW-SMS Series User Manual

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BRONKHORST HIGH-TECH B.V.

9.17.057

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Table of contents


 

SCOPE OF THIS MANUAL............................................................................................................................ 5 

1.1 

Introduction......................................................................................................................................................... 5 

1.2 

References to other applicable documents ........................................................................................................ 5 

STARTING UP............................................................................................................................................. 6 

2.1 

Check properties.................................................................................................................................................. 6 

2.2 

Rated pressure test inspection............................................................................................................................ 6 

2.3 

Check piping ........................................................................................................................................................ 6 

2.4 

Install system ....................................................................................................................................................... 7 

2.5  

Leak check ........................................................................................................................................................... 7 

2.6 

Electrical connection ........................................................................................................................................... 7 

2.7 

Analog / Digital operation ................................................................................................................................... 8 

2.8 

Multi‐functional switch operation....................................................................................................................... 8 

2.9 

Purging................................................................................................................................................................. 8 

2.10  

Zeroing................................................................................................................................................................. 9 

2.11 

Calibration ........................................................................................................................................................... 9 

2.12 

Supply pressure ................................................................................................................................................... 9 

2.13 

Description .......................................................................................................................................................... 10 

2.13.1  Introduction......................................................................................................................................................... 10 
2.13.2  Functional modules ............................................................................................................................................. 10 
2.13.3  Flow modules ...................................................................................................................................................... 10 
2.13.4  Pressure modules ................................................................................................................................................ 11 
2.13.5  Solenoid Operated shut off valves ...................................................................................................................... 13 
2.13.6  Toggle valves ....................................................................................................................................................... 13 
2.13.7  Needle valves....................................................................................................................................................... 14 
2.13.8  Pneumatic operated shut off valves.................................................................................................................... 14 
2.13.9  Pneumatic operated shut off 3/2 valves ............................................................................................................. 15 
2.13.10  Filter modules...................................................................................................................................................... 15 
2.13.11  Blind/Flow plates................................................................................................................................................. 16 
2.14 

Model key ............................................................................................................................................................ 17 

BASIC OPERATION ..................................................................................................................................... 18 

3.1 

General ................................................................................................................................................................ 18 

3.2 

Analog operation ................................................................................................................................................. 18 

3.3 

Manual interface: micro‐switch and LED’s.......................................................................................................... 18 

3.4 

RS232 FLOW‐BUS operation................................................................................................................................ 18 

3.5 

Fieldbus operation............................................................................................................................................... 20 

ADVANCED OPERATION............................................................................................................................. 21 

4.1 

Using mass flow meters/controllers on different gases or under different conditions ...................................... 21 

4.1.1 

Stored calibration curves..................................................................................................................................... 21 

4.1.2 

Multi Fluid / Multi Range instruments ................................................................................................................ 21 

4.1.3 

Conversion factor calculation using Fluidat software ......................................................................................... 21 

4.1.4 

Sealing material ................................................................................................................................................... 21 

4.1.5 

Maximum pressure drop ..................................................................................................................................... 22 

TROUBLESHOOTING AND SERVICE ............................................................................................................. 23 

5.1 

General ................................................................................................................................................................ 23 

5.2 

LED indication ...................................................................................................................................................... 23 

5.3 

Troubleshooting summary general ..................................................................................................................... 24 

5.4 

Service ................................................................................................................................................................. 25 

REMOVAL AND RETURN INSTRUCTIONS .................................................................................................... 26