Bronkhorst FLOW-SMS Series User Manual
Page 4
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BRONKHORST HIGH-TECH B.V.
9.17.057
page 4
Table of contents
1
SCOPE OF THIS MANUAL............................................................................................................................ 5
1.1
Introduction......................................................................................................................................................... 5
1.2
References to other applicable documents ........................................................................................................ 5
2
STARTING UP............................................................................................................................................. 6
2.1
Check properties.................................................................................................................................................. 6
2.2
Rated pressure test inspection............................................................................................................................ 6
2.3
Check piping ........................................................................................................................................................ 6
2.4
Install system ....................................................................................................................................................... 7
2.5
Leak check ........................................................................................................................................................... 7
2.6
Electrical connection ........................................................................................................................................... 7
2.7
Analog / Digital operation ................................................................................................................................... 8
2.8
Multi‐functional switch operation....................................................................................................................... 8
2.9
Purging................................................................................................................................................................. 8
2.10
Zeroing................................................................................................................................................................. 9
2.11
Calibration ........................................................................................................................................................... 9
2.12
Supply pressure ................................................................................................................................................... 9
2.13
Description .......................................................................................................................................................... 10
2.13.1 Introduction......................................................................................................................................................... 10
2.13.2 Functional modules ............................................................................................................................................. 10
2.13.3 Flow modules ...................................................................................................................................................... 10
2.13.4 Pressure modules ................................................................................................................................................ 11
2.13.5 Solenoid Operated shut off valves ...................................................................................................................... 13
2.13.6 Toggle valves ....................................................................................................................................................... 13
2.13.7 Needle valves....................................................................................................................................................... 14
2.13.8 Pneumatic operated shut off valves.................................................................................................................... 14
2.13.9 Pneumatic operated shut off 3/2 valves ............................................................................................................. 15
2.13.10 Filter modules...................................................................................................................................................... 15
2.13.11 Blind/Flow plates................................................................................................................................................. 16
2.14
Model key ............................................................................................................................................................ 17
3
BASIC OPERATION ..................................................................................................................................... 18
3.1
General ................................................................................................................................................................ 18
3.2
Analog operation ................................................................................................................................................. 18
3.3
Manual interface: micro‐switch and LED’s.......................................................................................................... 18
3.4
RS232 FLOW‐BUS operation................................................................................................................................ 18
3.5
Fieldbus operation............................................................................................................................................... 20
4
ADVANCED OPERATION............................................................................................................................. 21
4.1
Using mass flow meters/controllers on different gases or under different conditions ...................................... 21
4.1.1
Stored calibration curves..................................................................................................................................... 21
4.1.2
Multi Fluid / Multi Range instruments ................................................................................................................ 21
4.1.3
Conversion factor calculation using Fluidat software ......................................................................................... 21
4.1.4
Sealing material ................................................................................................................................................... 21
4.1.5
Maximum pressure drop ..................................................................................................................................... 22
5
TROUBLESHOOTING AND SERVICE ............................................................................................................. 23
5.1
General ................................................................................................................................................................ 23
5.2
LED indication ...................................................................................................................................................... 23
5.3
Troubleshooting summary general ..................................................................................................................... 24
5.4
Service ................................................................................................................................................................. 25
6
REMOVAL AND RETURN INSTRUCTIONS .................................................................................................... 26