4 pressure modules – Bronkhorst FLOW-SMS Series User Manual
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BRONKHORST HIGH-TECH B.V.
The control valve used in the FLOW‐SMS series is a standard, direct
operated solenoid valve (normally opened or normally closed),
operated through the PID‐control function on the pc‐board of the
flow or pressure meter. The diameter of the orifice under the
plunger is optimised for the customer’s specification.
9.17.057
page 11
Controllers or valves may not operate correctly, if process conditions vary too much, because of the
restriction of the orifice in the valve.
Instructions for replacing a Mass Flow Meter (MFM) or
Mass Flow Controller (MFC) module:
MFC
-
Removal
Ensure that the system is depressurised before taking Flow
module apart.
The power must be off when removing the electrical connectors.
Loosen the 4 bolts (M4) with hexagon head counter clockwise to
release the Flow module.
-
Replacement
Replace the gaskets depending on the type: FS‐200CV 2xAS‐108,
FS‐201CV 1xAS‐115 and 1xAS‐108, FS‐202CV 1xAS‐118 and 1xAS‐108.
Viton, EPDM or Kalrez.
All wetted parts have to be absolutely clean, don’t use oil or
grease and avoid dust!
Replace the Flow module and tighten the M4 bolts with hexagon
head by turning clockwise, tighten crosswise with 2,0 Nm.
Reattach the electrical connector.
Now the Flow module has to be tested for leakage and function.
MFM
Available Mass Flow Controller / Mass Flow Meter modules
Type
Type
Nominal
Range
Description
Controller (MFC)
Meter (MFM)
Range (based on N2@ 1 bara
FS‐200CV
FS‐100C
005
0.06…3 up to 0,18…9 mln/min
FS‐201CV
FS‐101C
020
0.16…8 up to 0,6…30 mln/min
FS‐201CV
FS‐101C
050
0,4…20 up to 1,5…75 mln/min
FS‐201CV
FS‐101C
100
0,8…40 up to 3…150 mln/min
FS‐201CV
FS‐101C
200
1,6…80 up to 6…300 mln/min
FS‐201CV
FS‐101C
500
4…200 up to 15…750 mln/min
FS‐201CV
FS‐101C
1k0
8…400 up to 30…1500 mln/min
FS‐201CV
FS‐101C
2k0
16…800 up to 60…3000 mln/min
FS‐201CV
FS‐101C
5k0
0,04…2 up to 0,15…7,5 ln/min
FS‐201CV
FS‐101C
7k0
0,05…2.6 up to 0,2…10 ln/min
FS‐202CV
FS‐102C
10k
0.08…4 up to 0.3…15 ln/min
FS‐202CV
FS‐102C
20k
0,16…8 up to 0.6…30 ln/min
FS‐202CV
FS‐102C
35k
0,25…12.5 up to 1…50 ln/min
2.13.4 Pressure modules
FLOW‐SMS pressure meters/controllers range from 100 mbar up to 10 bar,
measuring either absolute pressure or gauge pressure, with a very high accuracy
and repeatability. The instruments are equipped with a diaphragm based
piezo‐resistive sensor. Pressure controllers are available as forward controller
(P‐600 series) and backward controller (P‐700 series).
The flow going through the pressure controller depends on up and downstream
pressures, orifice diameter of the valve and the density of the fluid.