INFICON STM-2 USB Thin Film Rate/Thickness Monitor - Manual (Page 97)

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STM-2 Operating Manual
Appendix A
Material Table
A.1 Introduction
The following Table A-1 represents the density and Z-Ratio for various materials.
The list is alphabetical by chemical formula.
CAUTION
Some of these materials are toxic. Please consult the
material safety data sheet and safety instructions before
use.
An * is used to indicate that a Z-Ratio has not been established for a certain
material. A value of 1.000 is defaulted in these situations.
Table A-1 Material Table
Formula Density Z-Ratio Material Name
Ag 10.500 0.529 silver
AgBr 6.470 1.180 silver bromide
AgCl 5.560 1.320 silver chloride
Al 2.700 1.080 aluminum
Al
2
O
3
3.970 0.336 aluminum oxide
Al
4
C
3
2.360 *1.000 aluminum carbide
AIF
3
3.070 *1.000 aluminum fluoride
AIN 3.260 *1.000 aluminum nitride
AlSb 4.360 0.743 aluminum antimonide
As 5.730 0.966 arsenic
As
2
Se
3
4.750 *1.000 arsenic selenide
Au 19.300 0.381 gold
B 2.370 0.389 boron
B
2
0
3
1.820 *1.000 boron oxide
B
4
C 2.370 *1.000 boron carbide
BN 1.860 *1.000 boron nitride
Ba 3.500 2.100 barium
BaF
2
4.886 0.793 barium fluoride