INFICON STM-2 USB Thin Film Rate/Thickness Monitor - Manual (Page 53)

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STM-2 Operating Manual
Sycon STM Instrument Interface pane
Press to Halt . . . . . . . . . . . . . . . . . . Click to exit STM-x_win32.VI application.
Rate . . . . . . . . . . . . . . . . . . . . . . . . . Deposition rate based on the frequency of
the crystal.
Film Thick/Film Mass . . . . . . . . . . . Thickness or Mass of Film being monitored.
Substrate Thick/Substrate Mass. . Accumulated Thickness or Mass of all layers.
Clear Graphs. . . . . . . . . . . . . . . . . . Clears Rate, Mass/Thick, and Frequency
graphs.
Xtal OK? . . . . . . . . . . . . . . . . . . . . . Illuminated light green when a good crystal is
connected; dark green when a crystal fail has
occurred (see
Figure 4-3 ).
Figure 4-3 Xtal OK
RUNNING/PAUSED. . . . . . . . . . . . . Running changes to Paused if the process is
paused on the Operate tab (see section
4.3.2 on page 4-10 ).
h:mm:ss . . . . . . . . . . . . . . . . . . . . . Time that the current run number has been
running; resets with each new run.
Life/XTAL FAIL . . . . . . . . . . . . . . . . Percentage of crystal life remaining,
decremented from 100%; changes to XTAL
FAIL upon a crystal failure.
RUN #. . . . . . . . . . . . . . . . . . . . . . . . Incremented when New run is clicked on the
Operate tab (see section 4.3.2 on page
4-10 ).
LOGGING OFF/LOGGING ON . . . . Logging off changes to logging on when data
logging is enabled by selecting OFF/ON in
the Datalog pane of the Setup tab (see
section 4.3.1 ).
Film . . . . . . . . . . . . . . . . . . . . . . . . . Name of film being monitored is displayed.
Good
Crystal
Crystal
Fail