INFICON STM-2 USB Thin Film Rate/Thickness Monitor - Manual (Page 77)

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STM-2 Operating Manual
Zeroing commands
B None B Zeroes timer and thickness
C None C Zeroes thickness
D None D Zeroes timer
Film commands
= nnn to update parameter
? to query parameter
q =[8 char string],[?] q=COPPER Sets the current film name to COPPER
E =[0.500 - 99.99],[?] E=1.23 Set current film density to 1.23
F =[0.100 - 9.999],[?] F? 1.23 Returns current film Z factor
J =[10.0 - 399],[?] J = 80.1 Set current film tooling to 80.1%
r =[1 – 50],[?] r=10 Sets number of samples to 10 for temporal
averaging
Runtime data commands
M None M ! Return crystal fail status, was failed
@ =
crystal good
! = crystal failed
S None S -1595 Return thickness value -1.595 kÅ
s None s -1.6 Return film mass -1.6 µg/cm²
T None T 12.4 Return rate, 12.4 Å/s
t None t 23.4 Return mass accumulation rate in µg*s/cm²,
23.4 µg*s/cm²
U None U 5319234.34 Return sensor frequency 5,319,234.34Hz
V None V 12.4 Return crystal life, 12.4% remaining
W None W 12:45 Return timer, 12 min 45 s
a None a A Return RESET Status, true
@ =
OK
A = lost power
D = lost NONV memory
E = lost power and NONV memory
NOTE: NONV refers to non-volatile memory,
i.e. memory that is persistent even
when power is lost. This status is
indicating that there was a loss of
data, either due an internal database
problem, or a database purge.
Table 5-2 STM-2 command set (continued)
STM-2
command
Parameter Send Returned Description