INFICON STM-2 USB Thin Film Rate/Thickness Monitor - Manual (Page 55)

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STM-2 Operating Manual
Display pane
Thickness . . . . . . . . . . . . . . . . . . . . Displays Rate units of Å/s,
Film Thick units of kÅ, and
Substrate Thick units of kÅ on the
STM-x_win32.VI window.
Mass . . . . . . . . . . . . . . . . . . . . . . . . Displays Rate units of µg*s/cm², Film Mass
units of µg/cm², and Substrate Mass units of
µg/cm² on the STM-x_win32.VI window.
Multi-layer mode. . . . . . . . . . . . . . . When enabled, displays Substrate
Thick/Substrate Mass on the
STM-x_win32.VI window and displays the
New Layer button and Layer Stackup pane
on the Operate tab.
Run# . . . . . . . . . . . . . . . . . . . . . . . . Manually increment the Run number on the
Sycon STM Instrument Interface pane.
Datalog pane
OFF/ON . . . . . . . . . . . . . . . . . . . . . . Enables data logging.
Log Period. . . . . . . . . . . . . . . . . . . . hh:mm:ss
Assigns a data log period to record
monitored values. Records:

Date
 Time
 Running
 Life
 Run#
 Logging on
 Film
 Rate
 Film Thickness/Film Mass
 Substrate Thickness/Substrate Mass
 Frequency
Run# . . . . . . . . . . . . . . . . . . . . . . . . Names the file with the Run number.
STMxlog.txt . . . . . . . . . . . . . . . . . . . Names the file with STMxlog.
Tab delimiter . . . . . . . . . . . . . . . . . . Records values in data logs delimited with
tabs to separate each field.
Comma delimiter . . . . . . . . . . . . . . Records values in data logs with commas to
separate each field.
View Log . . . . . . . . . . . . . . . . . . . . . Click to view current data log.
Logfile folder. . . . . . . . . . . . . . . . . . Click the folder icon (
) to select the
location to save data log files.