beautypg.com

Brooks, Model 5850i, Figures – Brooks Instrument 5850i User Manual

Page 6: Tables

background image

ii

Brooks

®

Model 5850i

Contents

Installation and Operation Manual

X -TMF-5850i-MFC-eng

Part Number:541B108AAG

December, 2008

Figures

Figure

Page

Number

Number

1-1

Command Steps, Soft Start Disabled ................................ 1-2

1-2

0-100% Command Step, Soft Start Enabled ..................... 1-2

2-1

Model 5850i Dimensions ................................................... 2-3

2-2

"D" Type Connector Pin Arrangement ............................... 2-4

2-3

Maximum Allowable Loop Resistance ............................... 2-5

2-4

Common Electrical Hook-Ups ........................................... 2-6

2-5

Recommended I/O Wiring Configuration for Current Signals
(Non-Isolated Power Supply) ............................................. 2-7

2-6

Recommended I/O Wiring Configuration for Current Signals
(Isolated Power Supply) .................................................... 2-8

3-1

Flow Sensor Operational Diagram .................................... 3-2

3-2

Flow Control System Block Diagram ................................. 3-3

3-3

Model 5850i Calibration Connections ................................ 3-6

3-4

Adjustment Potentiometer Location .................................. 3-6

3-5

PC Board Jumper Location & Function ............................. 3-7

3-6

Fast Response Adjustment ............................................... 3-9

4-1

Torque Sequence for the Valve Retainer Plate .................. 4-3

4-2a

Valve Adjusting Spacer Locations(Normally Closed Valve N.C.)

.......................................................................................... 4-5

4-2b

Valve Adjusting Spacer Locations(Normally Open Valve N.O.)

.......................................................................................... 4-6

4-3

Voltmeter Connections for Valve Adjustment .................... 4-8

4-4

Example Nomograph ....................................................... 4-18

5-1

Model 5850i Parts Drawing ............................................... 5-1

Tables

Table

Page

Number

Number

2-1

Recommended Filter Size ................................................. 2-4

4-1

Bench Troubleshooting ...................................................... 4-2

4-2

Sensor Troubleshooting .................................................... 4-4

4-3

Conversion Factors (Nitrogen Base) ................................ 4-12

4-4

Model 5850i Orifice Sizing Nomograph ............................ 4-16

4-5

Model 5850i Standard Restrictors .................................... 4-19

5-1

Model 5850i Replacement Parts List ................................. 5-2

5-2

Tool and Spare Part Kits for 5850i Series .......................... 5-3