Brooks Instrument 5850i - Manual (Page 14)

2-4
Brooks ® Model 5850i
Section 2 Installation Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Note: The control valve in the Model 5850i provides precision control and
is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Maximum Flow Rate Recommended Filter Size
100 sccm 1 micron
500 sccm 2 microns
1 to 5 slpm 7 microns
10 to 30 slpm 15 microns
Figure 2-2 "D" Type Connector Pin Arrangement
1 SETPOINT RETURN 9 SUPPLY COMMON
2 VOLTAGE SIGNAL OUTPUT 10 SIGNAL OUTPUT RETURN
3 NOT USED 11 5V REFERENCE OUTPUT
4 CURRENT SIGNAL OUTPUT 12 VALVE OVERRIDE INPUT
5 +15 TO +28 Vdc SUPPLY 13 NOT USED
6 NOT USED 14 CHASSIS GROUND
7 CURRENT SETPOINT INPUT 15 NOT USED
8 VOLTAGE SETPOINT INPUT
*JUMPER SELECTABLE
NOTE: Cable shield tied to chassis ground in connector. Make no
connection on customer end.
Table 2-1 Recommended Filter Size