Brooks, Model 5850i – Brooks Instrument 5850i User Manual
Page 52
Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Brooks
®
Model 5850i
5-2
Section 5 Parts List
Item
Qty.
Description
Part Number
No.
1
1
Jam Nut
573B027ACK
2
1
Coil Assembly
S185Z271AAA
3
4
Screw, Valve
751C322AWA
4
1
Retaining Plate
715Z169AH%
5
1
O-ring, Valve Stem, Size 016
375B016***
6
1
Valve Stem: Normally Closed Valve
949Z194QOT
Valve Stem: Normally Open Valve
949Z215BMT
6A
1
Valve Plug
953Z068BMT
6B
1
Valve Ring
763Z064***
6C
1
Valve O-ring
375B016***
7
1
Valve Plunger Assy: Normally Closed Valve
S622Z165AAA
Normally Open Valve
S622Z203QOT
31
1
Insert Sleeve Normally Open Valve
456Z071QOT
32
1
Plunger Extension Normally Open Valve
622Z200BMT
8
1
Lower Guide Spring,unit with NO ORIFICE
820Z109DR%
Normally Closed Valve .001-.014 orifice
820Z109DR%
Normally Closed Valve .020-.120 orifice
820Z110DR%
Normally Open Valve all orifice sizes
820Z110DR%
9
AR
Small Valve Spacer, 0.005" Thick
810A362BMA
9
AR
Small Valve Spacer, 0.010" Thick
810A363BMA
10
AR
Large Valve Spacer, 0.005" Thick
810A368BMA
10
AR
Large Valve Spacer, 0.010" Thick
810A361BMA
33
1
Preload Spacer, Spring Normally Open valve
810A388BMT
Valve Seat with Viton Insert
S715Z051AAG
11
1
Valve Seat with Buna Insert
S715Z050AAG
Valve seat w/Kalrez insert (
S715Z297AAG
Valve Seat with Kalrez Insert (>200 psig)
S715Z163AAA
Valve Seat Solid 316 Stainless Steel
715Z181BNT
Stainless
ID 0.0013"
577Z375BMT
ID 0.002"
577Z376BMT
ID 0.003"
577Z377BMT
ID 0.004"
577Z378BMT
ID 0.007"
577Z381BMT
ID 0.010"
577Z383BMT
12
1
Orifice
ID 0.014"
577Z385BMT
ID 0.020"
577Z387BMT
ID 0.032"
577Z391BMT
ID 0.048"
577Z393BMT
ID 0.062"
577Z395BMT
ID 0.078"
577Z397BMT
(Refer to Section 4-6
ID 0.093"
577Z398BMT
for sizing)
ID 0.116"
577Z399BMT
ID 0.120"
577Z400BMT
13
1
O-ring, Orifice, Size 008
375B008***
14
1
Controller Body
092Z768BI%
15
1
PC Board Assembly (D-Connector)
S097Y249AAA
16
1
Sensor Assembly
S774Z508AAA
17
2
O-ring, Sensor, Size 004
375B004***
18
2
Allen Nut, Sensor-Body
753B269AWA
19
2
Lock Washer, Sensor
962D006AWA
20
5
Screw, Sensor-PC Board-Cover
753L056AWZ
21
1
Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
22
1
O-ring, Restrictor, Size 109
375B109***
23
1
Electronics Cover Can (D-Connector)
219Z432EA%
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=NS Not Shown
Table 5-1 Model 5850i Replacement Parts List