Brooks Instrument 5850i - Manual (Page 10)

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Brooks ® Model 5850i
Section 1 Introduction Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Temperature Sensitivity
Zero: Less than ±0.075% full scale per degree C.
Span: Less than ±1.0% full scale shift over 10-50°C range.
Mounting Attitude Sensitivity
±0.5% maximum full scale deviation after re-zeroing.
Command Input
Jumper Selectable: 0-5 Vdc, Input resistance 200k ohm or 4-20 mAdc,
Input resistance 75 ohm.
Leak Integrity
1 x 10 -9 Atm. scc/sec Helium
Control Range
50 to 1
Mechanical Connection
Interchangeable with most popular mass flow controllers.
Refer to Figure 2-1.
Electrical Connections
D-type, 15-pin connector (DA-15P). Mating connector supplied.
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and
101.3 kPa (760 Torr). The mass flow controller can be calibrated to other
reference standard conditions. Specify at time of ordering.