Brooks Instrument 5850i - Manual (Page 5)

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Brooks ® Model 5850i
Contents Installation and Operation Manual
X -TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
Section 1
Introduction
Paragraph Page
Number Number
1-1 Purpose ............................................................................. 1-1
1-2 Description ........................................................................ 1-1
1-3 Specifications .................................................................... 1-3
Section 2
Installation
2-1 Receipt of Equipment ........................................................ 2-1
2-2 Recommended Storage Practice ...................................... 2-1
2-3 Return Shipment ............................................................... 2-2
2-4 Gas Connections ............................................................... 2-2
2-5 Installation ......................................................................... 2-3
2-6 In-Line Filter ...................................................................... 2-4
2-7 Electrical Interfacing .......................................................... 2-5
2-8 Configuring the PC Board ................................................. 2-8
Section 3
Operation
3-1 Theory of Operation .......................................................... 3-1
3-2 Operating Procedure ......................................................... 3-2
3-3 Zero Adjustment ................................................................ 3-3
3-4 Calibration Procedure ........................................................ 3-4
3-5 Response .......................................................................... 3-8
Section 4
Maintenance
4-1 General ............................................................................. 4-1
4-2 Troubleshooting ................................................................. 4-1
4-3 Sensor Tube ...................................................................... 4-6
4-4 Disassembly and Assembly ............................................... 4-6
4-5 Use of the Conversion Tables .......................................... 4-10
4-6 Use of Orifice Sizing Nomograph ..................................... 4-11
4-7 Restrictor Sizing ............................................................... 4-15
Section 5
Parts List
5-1 General ............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment ......................... A-1