Bronkhorst EL-FLOW Base 2014 User Manual
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BRONKHORST HIGH-TECH
TABLE OF CONTENTS
1
General Product Information ........................................................................................................... 4
1.1
Introduction ....................................................................................................................................................... 4
1.2
Intended Use ...................................................................................................................................................... 4
1.3
Symbols .............................................................................................................................................................. 4
1.4
Product Support References .............................................................................................................................. 4
1.5
Warranty ............................................................................................................................................................ 5
1.6
Product Description ........................................................................................................................................... 5
1.7
Operating Principles ........................................................................................................................................... 8
1.8
Maintenance ...................................................................................................................................................... 9
2
Installation Instructions ................................................................................................................. 10
2.1
Introduction ..................................................................................................................................................... 10
2.2
Unpacking and inspection ................................................................................................................................ 10
2.3
Rated pressure test inspection ........................................................................................................................ 10
2.4
Instrument mounting ....................................................................................................................................... 10
2.5
Fluidic connections .......................................................................................................................................... 11
2.6
In-line filter usage ............................................................................................................................................ 11
2.7
Piping requirements ........................................................................................................................................ 11
2.8
Electrical connections ...................................................................................................................................... 12
2.9
Power and warm-up ........................................................................................................................................ 12
2.10
Pressure supply / Start-up ............................................................................................................................... 12
2.11
System purging ................................................................................................................................................ 13
2.12
Zeroing ............................................................................................................................................................. 13
3
Basic Operation ............................................................................................................................. 14
3.1
General ............................................................................................................................................................ 14
3.2
Analog operation ............................................................................................................................................. 14
3.3
Basic RS232 Flowbus operation ....................................................................................................................... 14
3.4
Modbus RS485 operation ................................................................................................................................ 15
3.5
Push-button operation .................................................................................................................................... 22
3.6
LED indications ................................................................................................................................................. 22
3.7
Basic Parameters and Properties ..................................................................................................................... 23
4
Advanced Operation ..................................................................................................................... 25
4.1
Reading and Changing Instrument Parameters ............................................................................................... 25
4.2
Using other gasses than specified .................................................................................................................... 30
5
Troubleshooting ............................................................................................................................ 31
5.1
General ............................................................................................................................................................ 31
5.2
LED indications ................................................................................................................................................. 31
5.3
Troubleshooting summary general .................................................................................................................. 31
6
Removal and Return Instructions ................................................................................................... 33
7
Service .......................................................................................................................................... 34
9.17.061
EL-FLOW Base Series Mass Flow Controllers
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