Monitor operating states, Electroless plating, Ready state – INFICON Maxtek PM-700 Plating Monitor User Manual
Page 29: Preplate state, Plate state, Deplate state, Endpoint state
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PM-700 SERIES PLATING MONITOR
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4.4.1
Monitor Operating States
The PM-700 can be in any one of a number of Operating States depending upon
the type of bath being monitored, electrolytic or electroless.
4.4.1.1 Electroless plating
Five different states are defined for operation with electroless plating baths.
4.4.1.1.1 Ready
State
In the Ready State plating rate and thickness are being monitored, but the
Endpoint check is not being performed and the crystal electrode current is zero.
The Ready State is entered on power ON and also by pressing the Stop button.
Pressing the Preplate, Plate or Deplate buttons steps the monitor from the Ready
State into the selected state.
4.4.1.1.2 Preplate
State
The Preplate State is activated by pressing the Preplate button while in the Ready
mode. If pressed in any state other than the Ready State, the Preplate button has
no effect. Upon entry to the Preplate state the crystal electrode current is adjusted
by the monitor to achieve the Preplate Rate parameter value and is maintained
until the Preplate Thickness is achieved at which time the monitor steps to the
Plate state.
4.4.1.1.3 Plate
State
The Plate State can be entered from the Ready State, Preplate State or Deplate
State by pressing the Plate button or automatically upon completion of the
Preplate State. During the Plate State the indicated thickness is compared with
the Endpoint parameter. When the indicated thickness equals or exceeds the
Endpoint parameter, the monitor steps to the Endpoint State.
4.4.1.1.4 Deplate
State
The Deplate State can be entered from the Ready State or the Endpoint State by
pressing the Deplate button. (Remember that monitor states are not the same as
probe states.) The Deplate State is exited to the Ready State by pressing the Stop
button or to the Plate State by pressing the Plate button. The Deplate State is
automatically terminated when the crystal health recovers to 95% at which time
the monitor returns to the Ready State.
4.4.1.1.5 Endpoint
State
The Endpoint State is automatically entered from the Plate State when the
indicated thickness equals or exceeds the Endpoint parameter value. Pressing the
Stop or Deplate buttons steps the monitor from the Endpoint State to the Ready or
Deplate state. The Preplate and Plate buttons produce no action while in the
Endpoint State.