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Specifications, Pecifications – INFICON Maxtek PM-700 Plating Monitor User Manual

Page 10

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PM-700 SERIES PLATING MONITOR

2

1.1 SPECIFICATIONS

PM-700

Series

Common

Specifications


Monitor

accuracy: 0.5 %


Basic

measurement

resolution:

Thickness:

0.01

µ

g/cm

2

Frequency: 0.5 Hz @ 5 MHz


Display

Resolution:

Weight:

0.01

µ

g/cm

2

Efficiency:

0.1%

Frequency:

0.1

Hz


Discrete

Outputs:

Preplate

achieved.

Thickness

achieved.

Low

rate

alarm.

High

rate

alarm.

Crystal

failed.

Spare.
Spare.

Level: 0 to 5 Vdc CMOS logic level.

Source

impedance: 100

ohm.


Discrete

Inputs:

Start

Preplate.

Start

Plate.

Start

Deplate

Stop

or

Reset.

Spare.

Logic level: Ground true.

Internal

4.7

k

ς

pull-up to 5 Volt.


DAC

Interface:

Outputs:

Two

independent

analog

outputs

Range: 0

to

5.0

Vdc

Accuracy:

± 3% of range + 1% of full scale.

Linearity: 0.5%

of

full

scale

Output

impedance:

10

k

ς

± 2%

Control inputs: Zero, Full Scale

Logic

level:

Ground

true.

Internal

4.7

k

ς

pull-up to 5 volt.