INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 74)

MDC-370 DEPOSITION CONTROLLER
Figure 4-13 DAC Setup Screen
1. DAC Output (Rate, Rate Dev., Power, Thickness)
One of four system control parameters is chosen for the DAC output. The default
setting is Rate for DAC #1 and Rate Deviation for DAC #2.
2. DAC Scale (2-digit, 3-digit)
Either the two least significant, or the three least significant, digits of the chosen
control parameter are used to represent full scale for the DAC output.
4.3.3.8 EDIT UTILITY SETUP
Selecting the Edit Utility Setup from the Edit System Setup menu will present the
Utility Setup screen. Figure 4-14 shows the first page of this screen. All
parameters are described below.
Figure 4-14 Utility Setup screen
1. Xtal Freq. (2.5, 3.0, 5.0, 6.0, 9.0, 10.0 MHz)
This parameter determines the uncoated crystal frequency type for all sensor
inputs. The default setting is 6.0 MHz.
2. Simulate Mode (On, Off)
This parameter enables or disables the Simulate mode of the controller. The
Simulate mode is used for process testing and differs from the Normal mode only
DAC Setup
DAC Output #1 >Rate <
DAC Scale #1 2 Digit
DAC Output #2 Power
DAC Scale #2 2 Digit
Utility Setup
Crystal Freq. 6.0 MHz
Simulate mode On
Interface address 01 (1-32)
Attention Volume 01 (0-10)
Alert Volume
01 (0-10)
Alarm Volume 01 (0-10)
Data Points/min 60 ppm ↓
PROGRAMMING AND CONTROLLER SETUP 4-42