INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 5)

3.1 INSPECTION ..................................................................................................................3-1
3.2 INITIAL POWER UP ......................................................................................................3-1
3.3 SAMPLE PROGRAM .....................................................................................................3-1
3.3.1 MATERIAL #1 PARAMETERS ...................................................................................3-2
3.3.2 MATERIAL #2 PARAMETERS ...................................................................................3-3
3.3.3 PROCESS PARAMETERS ..........................................................................................3-4
3.4 SIMULATE OPERATION ..............................................................................................3-4
3.5 MANUAL OPERATION ................................................................................................3-4
3.6 INSTALLING OPTION BOARDS .................................................................................3-4
3.6.1 SOURCE-SENSOR BOARD .......................................................................................3-5
3.6.2 DISCRETE I/O BOARD ..............................................................................................3-5
3.6.3 IEEE-488 OPTION BOARD .......................................................................................3-5
3.7 DIGITAL TO ANALOG CONVERTER (DAC) CHECKOUT.......................................3-5
4. PROGRAMMING AND CONTROLLER SETUP .........................................................4-1
4.1 GENERAL .......................................................................................................................4-1
4.1.1 NAVIGATING THE MENU STRUCTURE .................................................................4-1
4.1.2 ENTERING ALPHA CHARACTERS ...........................................................................4-2
4.1.3 ENTERING TIME PARAMETERS ..............................................................................4-2
4.1.4 COPYING AND DELETING ......................................................................................4-2
4.1.5 PASSWORD PROTECTION .......................................................................................4-2
4.1.5.1 VIEW/RUN PROCESS PASSWORD ........................................................................... 4-3
4.1.5.2 EDIT PROCESS PASSWORD ...................................................................................... 4-3
4.1.5.3 EDIT MATERIAL PASSWORD ................................................................................... 4-3
4.1.6 ADJUSTING PARAMETER/STATUS DISPLAY CONTRAST ....................................4-3
4.2 GETTING STARTED .....................................................................................................4-3
4.2.1 UTILITY SETUP .........................................................................................................4-4
4.2.2 DAC SETUP ...............................................................................................................4-4
4.2.3 SOURCE SETUP ........................................................................................................4-4
4.2.4 SENSOR SETUP .........................................................................................................4-7
4.2.4.1 EXAMPLE USING MAXTEK’S RSH-600 SIX CRYSTAL SENSOR HEAD ............ 4-9
4.2.5 INPUT, OUTPUT AND ACTION SETUP ..................................................................4-9
4.2.6 DISPLAY SETUP ......................................................................................................4-10
4.2.7 MATERIAL SETUP ...................................................................................................4-11
4.2.7.1 POWER RAMPS .......................................................................................................... 4-11
4.2.7.2 AUTOMATIC CRYSTAL SWITCHING .................................................................... 4-12
4.2.7.3 RATE ESTABLISH ..................................................................................................... 4-12
4.2.7.4 RATE RAMPS ............................................................................................................. 4-12
4.2.7.5 RATE SAMPLE MODE .............................................................................................. 4-13
4.2.7.6 RATE DEVIATION ALARM...................................................................................... 4-13
4.2.8 PROCESS SETUP .....................................................................................................4-13
4.2.9 STARTING A NEW PROCESS ..................................................................................4-13
4.2.10 RESUMING A PROCESS FROM ABORT OR HALT ..........................................4-13
4.3 DETAILED PROGRAMMING ....................................................................................4-14
4.3.1 VIEW/EDIT PROCESS .............................................................................................4-14
4.3.1.1 DEFINE A PROCESS .................................................................................................. 4-14
4.3.2 VIEW/EDIT MATERIAL ...........................................................................................4-16
4.3.2.1 DEFINE A MATERIAL............................................................................................... 4-16
4.3.3 SYSTEM SETUP .......................................................................................................4-24
4.3.3.1 EDIT DISPLAY SETUP .............................................................................................. 4-24
4.3.3.2 PROGRAM INPUTS ................................................................................................... 4-26
4.3.3.3 PROGRAM OUTPUTS................................................................................................ 4-27
4.3.3.4 PROGRAM ACTIONS ................................................................................................ 4-33
4.3.3.5 EDIT SENSOR SETUP ................................................................................................ 4-35
4.3.3.6 EDIT SOURCE SETUP ............................................................................................... 4-38
4.3.3.7 EDIT DAC SETUP ...................................................................................................... 4-41
4.3.3.8 EDIT UTILITY SETUP ............................................................................................... 4-42
5. OPERATING THE MDC-370 ...........................................................................................5-1
5.1 SIGN-ON SCREEN .........................................................................................................5-1
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