INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 139
MDC-370 DEPOSITION CONTROLLER
Material Density
2
48
2
80-9999
0.01 gm/cm
3
Acoustic Impedance
2
50
2
400-5999
0.01
gm/cm
2
/sec
Tooling Factor
2
52
1
100-4999
0.1%
Proportional gain
2
54
*
1-9999
None
Integral Time constant
2
56
1
0-999
0.1 Seconds
Derivative Time constant
2
58
1
0-999
0.1 Seconds
Rise to Soak Time
2
60
*
0-35999
Seconds
Soak Power
2
62
1
0-999
0.1%
Soak Time
2
64
*
0-35999
Seconds
Rise to Predeposit Time
2
66
*
0-35999
Seconds
Predeposit Power
2
68
1
0-999
0.1%
Predeposit Time
2
70
*
0-35999
Seconds
Rate Establish Error %
2
72
1
0-999
0.1 Å/sec
Deposition Rate #1
2
74
1
0-9999
0.1 Å/sec
Deposition Rate #2
2
76
1
0-9999
0.1 Å/sec
Deposition Rate #3
2
78
1
0-9999
0.1 Å/sec
Deposition Rate #4
2
80
1
0-9999
0.1 Å/sec
Deposition Rate #5
2
82
1
0-9999
0.1 Å/sec
Time Setpoint
2
84
*
0-35999
Seconds
Ramp to Feed Time
2
86
*
0-35999
Seconds
Feed Power
2
88
1
0-999
0.1%
Feed Time
2
90
*
0-35999
Seconds
Ramp to Idle Time
2
92
*
0-35999
Seconds
Idle Power
2
94
1
0-999
0.1%
Maximum Power
2
96
1
0-999
0.1%
Minimum Power
2
98
1
0-999
0.1%
Rate Deviation Attention
2
100
1
0-999
0.1%
Rate Deviation Alarm
2
102
1
0-999
0.1%
Rate Deviation Abort
2
104
1
0-999
0.1%
Sample Period
2
106
*
0-35999
Seconds
Sensor #1 Tooling
2
108
1
100-4999
0.1%
Sensor #1 Weight
2
110
1
0-4999
0.1%
Sensor #2 Tooling
2
112
1
100-4999
0.1%
Sensor #2 Weight
2
114
1
0-4999
0.1%
Sensor #3 Tooling
2
116
1
100-4999
0.1%
Sensor #3 Weight
2
118
1
0-4999
0.1%
Sensor #4 Tooling
2
120
1
100-4999
0.1%
Sensor #4 Weight
2
122
1
0-4999
0.1%
Sensor #5 Tooling
2
124
1
100-4999
0.1%
Sensor #5 Weight
2
126
1
0-4999
0.1%
Sensor #6 Tooling
2
128
1
100-4999
0.1%
Sensor #6 Weight
2
130
1
0-4999
0.1%
Material password
4
132
*
N/A
ASCII
Total
136
bytes
COMPUTER INTERFACE 11-9