6 edit source setup – INFICON MDC-370 Thin Film Deposition Controller User Manual
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MDC-370 DEPOSITION CONTROLLER
Table of Input states for BCD feedback type.
Crystal
number
Input
BCD2
Input
BCD1
Input
BCD0
1
OPEN
OPEN
OPEN
2
OPEN
OPEN
GND
3
OPEN
GND
OPEN
4
OPEN
GND
GND
5
GND
OPEN
OPEN
6
GND
OPEN
GND
7
GND
GND
OPEN
8
GND
GND
GND
SNGL HOME - Single home position feedback. This feedback type uses one
input. The input is normally false (open circuit) and should go true (closed to
ground) when crystal one is in position.
IN POSITION - In position feedback. This feedback type uses one input.
The input is normally false (open circuit) and should go true (closed to
ground) when the desired crystal is in position.
NO FEEDBACK - No crystal position feedback is used.
6. Rotator Delay (0 to 99 seconds)
This parameter serves two different functions. If the feedback type is “None”
(Not recommended. See cautions in the Installation section.), this parameter tells
the controller how long to wait assuming the crystal is in position. If position
feedback is provided, this parameter tells the controller how long it should wait
for the crystal to reach its target position before it issues a Sensor Fault message.
4.3.3.6 EDIT SOURCE SETUP
Selecting Edit Source Setup will present the Source Setup screen as shown in
Figure 4-12. In this screen you first select the source setup you wish to edit. To
select a source, use the Up-arrow and Down-arrow keys, then press the Right-
arrow or Enter key to select.
PROGRAMMING AND CONTROLLER SETUP
4-38