INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 147)

MDC-370 DEPOSITION CONTROLLER
Condition Name Condition Number Sub-condition Range
Controller State 128 0-25|
Input 129 0-15
Output 130 0-15
Process 131 0-98
Material 132 0-31
Source 133 1-6
Pocket 134 1-8
Sensor 135 1-6
Softnode 136 1-8
Sensor/Crystal 137 1-6,1-8, one byte
Layer 138 1-999, two bytes, MSByte first
Timer #1-8 139-146 1-9999, two bytes, MSByte first
Abort 147 Not Used
Halt 148 Not Used
Hold 149 Not Used
Time Power 150 Not Used
Ready 151 Not Used
In Process 152 Not Used
Simulate 153 Not Used
Time Setpoint 154 Not Used
Last Layer 155 Not Used
Crystal Failure 156 Not Used
Crystal Marginal 157 Not Used
Min Rate&Max Pwr 158 Not Used
Max Rate&Min Pwr 159 Not Used
Rate Dev. Alarm 160 Not Used
Rate Establish Error 161 Not Used
Source Fault 162 Not Used
Sensor Fault 163 Not Used
Rate Deviation Alert 164 Not Used
Max Power Alert 165 Not Used
Min Power Alert 166 Not Used
Rate Deviation Attention 167 Not Used
Max Power Attention 168 Not Used
Min Power Attention 169 Not Used
Manual Power 170 Not Used
All condition strings must be terminated with a null (zero).
Format: Header, Instruction=24, Length=1, Output #(0-15), Checksum
Example: To instruct the controller to send the Output setup parameter list for
Output #15 the computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(24)+Chr$(1)+Chr$(14)+Chr$(216)
COMPUTER INTERFACE 11-17