INFICON MDC-370 Thin Film Deposition Controller User Manual
Model mdc-370, Operation and service manual
OPERATION AND SERVICE MANUAL
MODEL MDC-370
MAXTEK AVERAGING DEPOSITION CONTROLLER
P/N 600800
S/N _____________
MAXTEK, INC.
http://www.maxtekinc.com
11980 Telegraph Road, Santa Fe Springs, CA 90670
Tel: (562) 906-1515
• Fax: (562) 906-1622
Email: [email protected]
Table of contents
Document Outline
- OPERATION AND SERVICE MANUAL
- MODEL MDC-370
- MAXTEK AVERAGING DEPOSITION CONTROLLER
- P/N 600800
- S/N _____________
- MAXTEK, INC.
- WARRANTY
- DISCLOSURE
- SAFETY
- Table of Contents
- Table of Figures
- List of Tables
- 1. GENERAL DESCRIPTION
- 1.1 PURPOSE
- 1.2 FEATURES
- 1.2.1 MULTI-CRYSTAL AVERAGING
- 1.2.2 EXTENSIVE PROGRAM STORAGE
- 1.2.3 DYNAMIC MEASUREMENT UPDATE RATE
- 1.2.4 SUPERIOR GRAPHICS DISPLAY
- 1.2.5 PROGRAM SECURITY
- 1.2.6 DESIGNED FOR UNATTENDED OPERATION
- 1.2.7 FAIL SAFE ABORTS
- 1.2.8 ABORT STATUS RETENTION
- 1.2.9 RUN COMPLETION ON CRYSTAL FAILURE
- 1.2.10 POWERFUL SYSTEM INTERFACE
- 1.2.11 POWER SUPPLY NOISE TOLERANCE
- 1.2.12 INTERNATIONAL STANDARD POWER CONNECTOR
- 1.2.13 FIELD UPGRADABLE
- 1.3 SPECIFICATIONS
- 1.4 ACCESSORIES
- 2. FRONT PANEL DISPLAYS AND CONTROLS
- 3. BENCH CHECKOUT & INSPECTION
- 4. PROGRAMMING AND CONTROLLER SETUP
- 4.1 GENERAL
- 4.2 GETTING STARTED
- 4.3 DETAILED PROGRAMMING
- 5. OPERATING THE MDC-370
- 5.1 SIGN-ON SCREEN
- 5.2 STARTING A NEW PROCESS
- 5.3 STARTING A NEW LAYER
- 5.4 RESUMING AN ABORTED OR HALTED PROCESS
- 5.5 GRapH DISPLAYS
- 5.6 STATUS DISPLAYS
- 5.7 VIEWING RESULTS
- 5.8 MODES
- 5.9 STATES
- 5.10 TROUBLE, ERROR AND WARNING MESSAGES
- 5.10.1 DESCRIPTION
- 5.10.1.1 MIN RATE&MAX POWER
- 5.10.1.2 MAX RATE&MIN POWER
- 5.10.1.3 SYSTEM SETUP MEMORY CORRUPTED
- 5.10.1.4 PROCESS MEMORY CORRUPTED
- 5.10.1.5 MATERIAL MEMORY CORRUPTED
- 5.10.1.6 RATE EST. ERROR
- 5.10.1.7 CRYSTAL FAILURE
- 5.10.1.8 SOURCE FAULT
- 5.10.1.9 SENSOR FAULT
- 5.10.1.10 NO SENSORS ENABLED
- 5.10.1.11 TIME POWER
- 5.10.1.12 RATE DEV. ALARM
- 5.10.1.13 ALARM ACTION
- 5.10.1.14 CRYSTAL MARGINAL
- 5.10.1.15 RATE DEV. ALERT
- 5.10.1.16 MAX POWER ALERT
- 5.10.1.17 MIN POWER ALERT
- 5.10.1.18 ALERT ACTION
- 5.10.1.19 XTAL FAIL SWITCH
- 5.10.1.20 XTAL MRGN SWITCH
- 5.10.1.21 RATE DEV. ATTEN
- 5.10.1.22 MAXIMUM POWER
- 5.10.1.23 MINIMUM POWER
- 5.10.1.24 CHANGE POCKET...
- 5.10.1.25 CHANGE CRYSTAL...
- 5.10.1.26 ATTENTION ACTION
- 5.10.1.27 CALIBRATION DONE
- 5.10.1 DESCRIPTION
- 6. Tuning the MDC-370 Control Loop
- 7. INPUT/OUTPUT CHARACTERISTICS
- 8. CONTROLLER INSTALLATION
- 9. SYSTEM INSTALLATION
- 10. THEORY OF OPERATION
- 11. COMPUTER INTERFACE
- 12. REPAIR AND MAINTENANCE
- 13. APPENDIX A
- 14. APPENDIX B – PARAMETER TEMPLATES
- 15. INDEX
- 16. MENU MAP