INFICON MDC-370 Thin Film Deposition Controller - Manual (Page 179)

MDC-370 DEPOSITION CONTROLLER
15. INDEX
A
alpha characters, entering, 4-2
automatic crystal switching. See crystal
switching
C
computer interface, 11-1
data types, 11-3
IEEE-488 parallel interface, 11-2
instruction descriptions, 11-5
instruction summary, 11-4
message received status, 11-3
protocol, 11-2
RS-232 serial interface, 11-1
RS-485 serial interface, 11-1
contrast, 2-4, 4-3
control loop, tuning, 6-1
establishing control loop parameters,
6-3
copying and deleting, 4-2
crystal failure, 3-4
Crystal Health, 2-2, 10-3
crystal switching, 4-12
D
DAC (Digital to Analog Converter)
bench checkout, 3-5
communications, send utility
parameters, 11-6
input characteristics, 7-2
interface cable description, 8-3
menu, DAC Output, 4-42
menu, DAC Scale, 4-42
menu, EDIT DAC SETUP, 4-41
output characteristics, 7-2
output circuit schematic, 7-6
plug pin out, 13-2
setup, 4-4
socket connector pin out, 8-6
specification, recorder outputs, 1-6
troubleshooting, 12-3
deposit state, 3-4, 4-21
display
Crystal Health, 2-2
Layer Number, 2-1
Power, 2-1
Rate, 2-1
Thickness, 2-1
Time Display, 2-2
display setup, 4-11
E
empirical calibration, 10-5
F
front panel, 2-1, 2-2, 3-1, 3-6, 4-25, 8-1,
8-2, 11-1, 11-2, 11-32
G
getting started. See programming
sequence
graph displays, 5-3
graphics display, 1-2, 2-2
ground lug, 8-2
I
input, output and action setup, 4-10
input/output characteristics, 7-1
digital-to-analog converter control
inputs, 7-2
digital-to-analog converter outputs, 7-
2
discrete inputs, 7-2
discrete outputs, 7-2
sensor input, 7-1
source control voltage output, 7-1
installation, controller, 8-1
external connections, 8-1
mounting, 8-1
proper grounding, 8-1
installation, system, 9-1
instrumentation feedthrough, 9-3
sensor crystal replacement. See sensor
crystal replacement
sensor head description, 9-1
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