INFICON MDC-370 Thin Film Deposition Controller User Manual
Page 142

MDC-370 DEPOSITION CONTROLLER
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(12)+Chr$(1)+Chr$(15)+Chr$(227)
14. Send process layer (Code #13)
Instructs the controller to send the process layer parameters for process # n layer #
y to the host computer. A description of the process layer parameter list is as
follows:
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Process #
1
*
(0-98)
None
Layer #
2
*
(0-998)
None
Layer # n Thickness
3
3
(0-999900) Å
Layer # n Material #
1
*
(0-31)
None
Total 7 bytes
Format: Header, Address, Instruction=13, Length=3, 1 byte Process #, 2 byte
Layer #, Checksum.
Example: To instruct the controller to send the process layer parameters for
process #15 layer #5 the computer would send:
Chr$(255)+Chr$(254)+Chr$(1)+Chr$(13)+Chr$(3)+Chr$(15)+Chr$(0)+C
hr$(5)+ Chr$(219)
15. Insert process layer (Code #14)
Instructs the controller to insert the incoming layer parameters of process # n in
front of layer # y adding the layer to the process. A description of the insert
process layer parameter list is as follows:
Parameter Name
Length (bytes)
Decimal Pt.
Position
Range
Units
Process #
1
*
(0-98)
None
Layer #
2
*
(0-998)
None
Layer # n Thickness
3
3
(0-999900) Å
Layer # n Material #
1
*
(0-31)
None
Total 7 bytes
If all of the layers are defined then the controller will respond with and
insufficient layer space error.
16. Replace process layer (Code #15)
Instructs the controller to enter the incoming process layer parameters into
process # n layer # y. A description of the process layer parameter list is given
above.
Writing a layer to an undefined process results in an error. To define a process,
use the Receive Process instruction.
17. Delete process layer (Code #16)
Instructs the controller to delete later # y from process # n.
COMPUTER INTERFACE
11-12