INFICON CrystalSix Sensor - Manual (Page 9)

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CrystalSix Operating Manual
Chapter 1
Sensor Specifications
1.1 Specifications for CrystalSix Sensor 750-446-G1
CAUTION
Incorrect rotation direction with the stops disabled will
cause permanent damage rendering transducer
inoperative. See
Figure 1-2 on page 1-5 for proper
direction of rotation.
The CrystalSix® sensor is a (six crystal) quartz crystal deposition monitor
transducer. When the monitor crystal being used fails a new crystal is advanced
into position, fully replacing that crystal’s function. The mechanism used for
providing this motion is pneumatically powered. The logic for automatic operation
of this transducer is conveniently provided on most current INFICON Deposition
Controllers. It is manufactured under US Patent #5,025,644, with foreign patents
pending.
Figure 1-1 CrystalSix Sensor
Table 1-1 Sensor specification
Maximum bakeout temp with no water 130 °C
Maximum operating isothermal
environment temperature with minimum
water flow 400 °C
Size (maximum envelope) 3.8" (9.7 cm) DIA x 2.0" (5.1 cm) high