2 xtc/2 or xtc/c deposition controller, 3 ic/4 or ic/4 plus deposition controller – INFICON CrystalSix Sensor User Manual
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CrystalSix Operating Manual
2.2.2 XTC/2 or XTC/C Deposition Controller
1
Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2
Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3
Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
757-302-G1).
4
Connect one end of the XX' long XIU cable (IPN 757-303-GXX) to the mating
connector of the XIU.
5
Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6
Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.2.3 IC/4 or IC/4 PLUS Deposition Controller
1
Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2
Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
or the feedthrough.
3
Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
755-252-G1).
4
Connect one end of the 15' long XIU cable (IPN 755-258-G15) to the mating
connector of the XIU.
5
Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6
Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.