INFICON Sensistor ILS500F Leak Detection System - Manual (Page 53)

53 Troubleshooting
ninp69e1-a (1410)
Manifold Tightness (gross)
The overall tightness of the manifold is tested using the vacuum raise method.
Possible results:
• No Leakage from Outside
• Leakage from Outside
Leaks in the manifold can result in:
• False vacuum decay rejects
• Increased gas consumption
Minor external leakage will be found later during the
gas test step.
Vacuum Sensor Valve
This checks that the valve shuts to protect vacuum sensor before filling.
Possible results:
• Valve works
• Faulty!
Malfunction can result in:
• Damage to vacuum sensor
• Failed pre-evacuation
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.82 bar
bar
Manifold Tightness
No Leakage from Outside
0.00
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
0.00 bar
bar
Vacuum Sensor Valve
Valve works!
0.00