INFICON Sensistor ILS500F Leak Detection System - Manual (Page 52)

Troubleshooting 52
ninp69e1-a (1410)
Evacuation Valve
Evacuation valve is checked for internal leakage.
Possible results:
• No Internal Leakage
• Internal Leakage
Internal leakage can result in:
• False vacuum decay rejects
• Increased tracer gas consumption
Venturi Pump
Checking max vacuum of Venturi pump.
Possible results:
• Max Vacuum OK
• Poor Max Vacuum
Poor max vacuum can result in:
• Failed pre-evacuation
• Slower evacuation
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.03
0.00
bar
bar
Evacuation Valve
No Internal Leakage
Hardware Test
CONTINUE STOP
Vacuum:
Pressure:
-0.88
0.00
bar
bar
Venturi Pump
Max Vacuum OK