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Alicat M Series Mass Flow Meter User Manual

Page 74

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Fastest

Flow

Controller

Company

in

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orld!

#

Gas

Absolute

Viscosity*

25°C

Density **

25°C

14.696PSIA

Compressibility

25°C

14.696PSIA

0

Air

Air

184.918

1.1840

0.9997

1

Argon

Ar

225.593

1.6339

0.9994

2

Methane

CH4

11

1.852

0.6569

0.9982

3
Carbon Monoxide

CO

176.473

1.1453

0.9997

4

Carbon

Dioxide

CO2

149.332

1.8080

0.9949

5

Ethane

C2H6

93.540

1.2385

0.9924

6

Hydrogen

H2

89.153

0.08235

1.0006

7

Helium

He

198.457

0.16353

1.0005

8

Nitrogen

N2

178.120

1.1453

0.9998

9

Nitrous Oxide

N2O

148.456

1.8088

0.9946

10

Neon

Ne

31

1.149

0.8246

1.0005

11

Oxygen

O2

204.591

1.3088

0.9994

12

Propane

C3H8

81.458

1.8316

0.9841

13

normal-Butane

n-C4H10

74.052

2.4494

0.9699

14

Acetylene

C2H2

104.448

1.0720

0.9928

15

Ethylene

C2H4

103.177

1.1533

0.9943

16

iso-Butane

i-C4H10

74.988

2.4403

0.9728

17

Krypton

Kr

251.342

3.4274

0.9994

18

Xenon

Xe

229.785

5.3954

0.9947

19
Sulfur Hexafluoride

SF6

153.532

6.0380

0.9887

#

Gas

Absolute

Viscosity*

25°C

Density **

25°C

14.696PSIA

Compressibility

25°C

14.696PSIA

20

75%Ar / 25% CO2

C-25

205.615

1.6766

0.9987

21

90%

Ar / 10% CO2

C-10

217.529

1.6509

0.9991

22

92%

Ar / 8% CO2

C-8

219.134

1.6475

0.9992

23

98%

Ar / 2% CO2

C-2

223.973

1.6373

0.9993

24

75% CO2 / 25%

Ar

C-75

167.451

1.7634

0.9966

25

75%

Ar / 25% He

A-75

230.998

1.2660

0.9997

26

75% He / 25%

Ar

A-25

234.306

0.5306

1.0002

27

90% He / 7.5%

Ar /

2.5% CO2

Helistar® A1025

A1025

214.840

0.3146

1.0003

28

90%

Ar / 8% CO2 /

2% O2

Stargon® CS

Star29

218.817

1.6410

0.9992

29

95%

Ar / 5% CH4

P-5

223.483

1.5850

0.9993

*in micropoise

(1 Poise = gram / (cm) (sec)) **Grams/Liter

Reference: NIST REFPROP

7 Database

SCFM

1.00

=

28.3160

SLPM

SLPM

100.00

=

3.5316

SCFM

SCFH

1.00

=

0.4719

SLPM

SLPM

100.00

=

21

1.9093

SCFH

SCIM

100.00

=

1.6390

SLPM

SLPM

1.00

=

61.0128

SCIM

SCIH

1000.00

=

0.2732

SLPM

SLPM

1.00

=

3660.7688

SCIH

Gas V

iscosity

, Density and Compr

essibility:

Flo

w Con

ver

sions:

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Tucson

AZ 85743 USA

Phone: 888-290-6060

Fax: 520-290-0109