Alicat M Series Mass Flow Meter - Manual (Page 42)

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Technical Data for Alicat M Mass Flow Meters
0 to 0.5 sccm Full Scale through 0 to 4000 slpm Full Scale
Standard Operating Specifications (Contact Alicat for available options)
Performance M-Series Mass Flow Meter
Accuracy at calibration conditions
after tare
± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration conditions
after tare
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500 slpm.
Accuracy for Bidirectional Meters
at calibration conditions after tare
± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale)
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Measurable Flow Rate 128% Full Scale
Typical Response Time 10 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power M-Series Mass Flow Meter
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Output Signal 1 Options RS-232 Serial / RS-485 Serial / PROFIBUS 3
Analog Output Signal 2 Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog Output
Signal 2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage 7 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.040 Amp (+ output current on 4-20 mA)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specifications for PROFIBUS supply voltages and currents (page 48).
Operating Conditions M-Series Mass Flow Meter
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Maximum Pressure 145 psig
Mounting Attitude Sensitivity None
Ingress Protection IP40
Wetted Materials
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced Nylon,
Aluminum. If your application demands a different material, please contact Alicat.
Full Scale Flow Mass
Meter
Pressure Drop at FS Flow
(psid) venting to atmosphere 1
Mechanical
Dimensions
Process Connections 2
0.5 sccm to 1 sccm 1.0
3.9”H x 2.4”W x 1.1”D
M-5 (10-32) Female Thread 3
2 sccm to 50 sccm 1.0
100 sccm to 20 slpm 1.0 4.1”H x 2.4”W x 1.1”D 1/8” NPT Female
50 slpm 2.0
4.4”H x 4.0”W x 1.6”D 1/4” NPT Female
100 slpm 2.5
250 slpm 2.1 5.0”H x 4.0”W x 1.6”D 1/2” NPT Female
500 slpm 4.0
5.0”H x 4.0”W x 1.6”D
3/4” NPT Female
(A 1-1/4” NPT Female optional
process connection is available
for 2000 slpm meters.)
1000 slpm 6.0
1500 slpm 9.0
2000 slpm 5.0 5.3”H x 5.2”W x 2.9”D
3000 slpm 7.1 5.3”H x 5.2”W x 2.9”D 1-1/4” NPT Female
4000 slpm 4.4 7.6”H x 5.2”W x 2.9”D 2” NPT Female
1. Lower Pressure Drops Available, please see our WHISPER-Series mass flow controllers at www.alicat.com/whisper.
2. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fittings. VCR and
SAE connections upon request.
3. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.
Range Specific Specifications