Alicat M Series Mass Flow Meter User Manual
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MS-Series:
0 – 0.5 sccm
0 – 1 sccm
0 – 2 sccm
0 – 5 sccm
0 – 10 sccm
0 – 20 sccm
0 – 50 sccm
MS-Series:
0 – 100 sccm
0 – 200 sccm
0 – 500 sccm
0 – 1 slpm
0 – 2 slpm
0 – 5 slpm
0 – 10 slpm
0 – 20 slpm
100 sccm to 20 slpm approximate shipping weight: 1.0 lb
0.5 sccm to 50 sccm approximate shipping weight: 0.8lb