Alicat M Series Mass Flow Meter - Manual (Page 45)

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M-Series:
0 – 500 slpm
0 – 1000 slpm
0 – 1500 slpm
M-Series:
0 – 2000 slpm
500 slpm to 1500 slpm approximate shipping weight: 3.5 lb
2000 slpm approximate shipping weight: 4.5 lb