Alicat M Series Mass Flow Meter - Manual (Page 51)

51
Technical Data for Alicat MS-Series Mass Flow Meters
Alicat MS instruments are built for use with aggressive gases. For the most part, these
instruments maintain the specifications of equivalently ranged M-Series devices.
Standard Compatible Gas List for MS-Series Meters
0 Air Air
1 Argon Ar
2 Methane CH4
3 Carbon Monoxide CO
4 Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
7 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
10 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane n-C4H10
14 Acetylene C2H2
15 Ethylene C2H4
16 iso-Butane i-C4H10
17 Krypton Kr
18 Xenon Xe
19 Sulfur Hexafluoride SF6
20 75%Ar / 25% CO2 C-25
21 90% Ar / 10% CO2 C-10
22 92% Ar / 8% CO2 C-8
23 98% Ar / 2% CO2 C-2
24 75% CO2 / 25% Ar C-75
25 75% Ar / 25% He A-75
26 75% He / 25% Ar A-25
27
90% He / 7.5% Ar /
2.5% CO2
Helistar® A1025
A1025
28
90% Ar / 8% CO2 /
2% O2
Stargon® CS
Star29
29 95% Ar / 5% CH4 P-5
30 Nitric Oxide NO
31 Nitrogen Triflouride NF3
32 Ammonia NH3
33 Chlorine Gas Cl2
34 Hydrogen Sulfide H2S
35 Sulfur Dioxide SO2
36 Propylene C3H6
In addition, the following gases are
available upon request:
Nitrogen Dioxide to 0.5%
in an inert carrier
NO2
Refrigerant gases to 100%
If your application requires another gas or gas mixture, please contact
[email protected] or call 888-290-6060. We will do our best to accommodate
your request.
Please refer to the Technical Data for the equivalently ranged M-Series
instrument for all operating specifications except:
Operating Range 1% to 100% Full Scale
Turndown Ratio 100 : 1
Wetted Materials
316LSS, FFKM (Kalrez) standard; Viton, EPDM, Buna,
Neoprene as needed for some gases.
The dimensions of MS instruments may vary from their standard M-Series
counterparts. Dimensional drawings for MS instruments are shown on pages 52-55.