Flomega, liquid mfc’s/mfm’s – Brooks Instrument 5882/92 User Manual
Page 9
9
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
When EEx d IIB T4...T6 required, please contact factory for detailed dimensional drawing.
Connections
A
A with filter
5/16” - 24 UNF
143,5 mm
175 mm
1/16” Tube Compression
176,5 mm
208 mm
1/8” Tube Compression
188 mm
220 mm
1/4” Tube Compression
188 mm
220 mm
1/4” NPT(F)
208 mm
240 mm
Figure 1-1 Dimensions
Section 1 Introduction
This manual is related to the following products:
See also other documents in the category Brooks Instrument Hardware:
- QMBC (52 pages)
- SolidSense II (28 pages)
- SLA7810/20 (36 pages)
- SLA5810/20 (50 pages)
- SLA5840 (46 pages)
- SLA7840 (40 pages)
- 5866E (65 pages)
- IPS122 2 Indicating Pressure Switches" (18 pages)
- IPT122 2 Indicating Pressure Transmitters" (22 pages)
- 8601 (20 pages)
- PTI Metal Seal Mass Flow Controller w/Real-Time Flow Error Detection & Advanced Diagnostics (82 pages)
- SLA5800 Series (76 pages)
- 5800S Series (50 pages)
- 4800 Series (50 pages)
- 5850EM (74 pages)
- 5851EM (62 pages)
- 5850E (64 pages)
- 5851E (64 pages)
- 5860E (46 pages)
- 5861E (44 pages)
- 5850i (62 pages)
- 5851i (62 pages)
- 5860i (48 pages)
- 5861i (48 pages)
- GF40 (78 pages)
- SLAMf Series (76 pages)
- Mfi Series (82 pages)
- 0254 (124 pages)
- 0260 (14 pages)
- CMC Series (36 pages)
- XacTorr CMX45 (64 pages)
- MT3809G (78 pages)
- MT3809E (72 pages)
- MT3810 (66 pages)
- 3600 Series (56 pages)
- 3750 (64 pages)
- Control Valve (16 pages)
- GT1000 (52 pages)
- 1100 Series (52 pages)
- 1307 (18 pages)
- 1358 (44 pages)
- 1350 (46 pages)
- 1250 (2 pages)
- FC8800 Series (48 pages)