Brooks Instrument 5882/92 - Manual (Page 6)

6
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
Figure Page
Number Number
1-1 Dimensions .................................................................................................................................... 9
2-1 Standard and EEx nA execution .................................................................................................... 13
2-2 Pin Function ................................................................................................................................... 13
2-3 Eex d. execution ............................................................................................................................ 13
2-4 Pin Wire Color Function ................................................................................................................. 13
3-1 Measurement Principle 5891 .......................................................................................................... 16
3-2 Measurement Principle .................................................................................................................. 17
3-3 Principle Mass Flow Controller ....................................................................................................... 18
3-4 Jumper Settings for Flomega ......................................................................................................... 20
3-5 Jumper Settings for Flomega ......................................................................................................... 20
5-1 Flomega spare parts ...................................................................................................................... 26
Table
Number
5-1
Spare Parts list .............................................................................................................................. 25
Contents