Brooks Instrument 5882/92 - Manual (Page 25)

25
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
Section 5 Parts List
5-1 General
Refer to figure 5-1 and table 5-1 to order replacement parts.
Table 5-1
* Recommended Spare Parts
Ref. Quant. Description Part No.
No. Req.
1 1 Washer 964-E-019-ACK
2 1 Coil Assembly 185-Z-131-ZZZ
3 4 Screws 760-Z-052-ACA
4 1 Shassis Connector 207-G-008-ZJK
5* 1 Valve O-ring Buna-N 375-B-016-SUA
Viton 375-B-016-QTA
Teflon 375-B-016-QMA
6 1 Stem Assembly 839-Z-040-AAA
7 1 Plunger Assembly 622-Z-119-AAA
8 1 Lower Guide Spring 820-Z-076-BBA
9* 1 Valve Seat Viton 715-Z-245-AAA
Buna-N 715-Z-246-AAA
Kalrez 715-Z-162-AAA
10 1 Orifice 577-Z-151-BMT
11* 1 Orifice O-ring Buna-N 375-B-006-SUA
Viton 375-B-006-QTA
Kalrez 375-B-006-TTA
13 1 PC Board Assembly for model 5881/91 097-B-251-ZZZ
13 1 PC Board Assembly for model 5882/92 097-B-219-ZZZ
14 1 Cable Connector 207-F-014-ZJK
15* 1 O-ring Buna-N 375-B-003-SUA
Viton 375-B-003-QTA
Kalrez 375-B-003-TTA
17* 1 O-ring Buna-N 375-B-010-SUA
Viton 375-B-010-QTA
Teflon 375-B-010-QMA
18 1 Cover 442-B-088-EAD
19* 1 Gasket 375-E-109-TDA
23 2 O-ring Viton 375-B-902-QTA
Buna-N 375-B-902-SUA
Teflon 375-B-902-QMA
Section 5 Spare Parts