Brooks Instrument 5882/92 - Manual (Page 12)

12
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
2-7 In-line Filter
An in-line type 40 micron filter has been installed upstream from the flow sensor to prevent the possibility
of any foreign material entering the flow sensor or control valve.
2-8 Connections
Standard, the Flomega models are supplied with adapters. Inlet and outlet thread size is 5/16”-24 UNF.
Optional adapters can be supplied.
5/16”-24 to 1/16” tube compression fittings
5/16”-24 to 1/8” tube compression fittings
5/16”-24 to ¼” tube compression fittings
5/16”-24 to ¼” NPT (F)
Prior to installation, make certain all piping is clean and free of obstructions. Install the piping in such a
manner that permits easy removal if the instrument is to be removed for cleaning or test bench
troubleshooting.
2-9 Precision 5V Reference
The 5881/5882 is equipped with a precision 5V reference. The reference voltage is available at terminal 11
(ref. to fig. 2-1) for use in conjunction with potentiometer to provide a 0-5 Vdc command.
2.10 Command Input
The command input hook-up is as follows: a. Connect the external command voltage to terminal 8,
(command input) and to terminal 1 (command input return). Refer to figure 2-1.
2-11 Valve Override
The valve override function allows full opening and closing of the valve independent of the command
setting. The valve override function can be accessed from terminal 12. Refer to figure 2-1.
The valve override for the mass flow controller is as follows:
a. To open the valve apply a voltage between +5 Vdc and +15 Vdc to the valve override terminal. (V.O.R.+)
b. To close the valve apply 0 Vdc, or “common” to the valve override terminal. (V.O.R.-)
Note: For normal operation terminal 12 must be left open (floating).
Section 2 Installation