Flomega, liquid mfc’s/mfm’s – Brooks Instrument 5882/92 User Manual
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Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
Specification
Flowranges
Brooks FLOMEGA
TM
Models
Min. full scale Flowrate*
Max. full scale Flowrate*
Units
PED Module Category
5881/91
15**
100
gr/hour
S.E.P.
5882/92
200
1000
gr/hour
S.E.P.
*
To be specified at ordering (factory selectable) (water equivalent flowranges)
**
Down to 15 gr/hour minimum full scale is possible
@ ± 1% f.s. accuracy and ± 0,4% f.s. repeatability
Flowranges from > 30 gr/h are within specified accuracy
Rangeability
50:1
Viscosity limits
Up to 200 cP (limited by max. diff. pressure)
Ambient temperature range
0 - 65°C
Process temperature range
0 to 100°C (Model 5882/92: max. 90°C)
Pressure limits
100/400 bar versions
Max pressure difference
•
Model 5881: 20 bar
•
Model 5882: 40 bar
Pressure drop sensor
•
Model 5891: 10 mbar @ 100 gram/hour water
•
Model 5892: 150 mbar @ 1000 gram/hour water
Setpoint input/Flow signal output
0 (4) -20 mA*, or 0-5Vdc*
Power supply
+ 15Vdc or 24Vdc* ± 10% max. current 660 mA
Warm-up time
Performance within specifications: 60 minutes
(Within ± 1.5% F.S. accuracy: 15 minutes)
Response time
(to within 2% of final value for a 2-100% command change, at a constant
operating pressure)
•
Models: 5881/91: 5 seconds
•
Models: 5882/92: 7 seconds
Mounting insensitivity
Not affected by mounting position*
Certification
•
ATEX Zone I, II 2 GD KEMA 03 ATEX2036
CE 0344 EEx d IIB T6...T4 T100°C (IP 66)
Temperature Class
Process Temperature
T6
< 75°C
T5
75 - 85°C
T4
85 - 100°C
•
ATEX Zone 2, II 3 GD KEMA 99 ATEX3626
EEx nA II T4 T75°C (IP65) Per: EN 60079-15:2003
EN 50281-1-7:1998+A1
* To be specified at ordering
Physical specifications
Mechanical connections
•
Standard: 1/16” or 1/8” tube connections
•
Optional: ¼” tube compression, ¼” NPT (F), or ¼”B.VCO fittings
Inlet filter
Material: stainless steel
Mess size: 40 micron
Materials of construction
•
All wetted materials: stainless steel. For seals: Viton, PTFE, EPDM,
Buna or Kalrez
•
All stainless steel construction (including welded adapters) for
SANITARY sensor
Housing materials
Cast aluminium
Electrical connections
12-pole circular connector
Weight
less than 3.5 kg
Per:
EN 50014:1997 +A1 + A2
EN 50018:2000 + A2
EN 50281-1-1:1998 + A1
Section 1 Introduction