Brooks Instrument 5882/92 - Manual (Page 23)

23
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
4-3 Trouble Shooting Guidelines
General
Before applying power, remove cover of the housing and check jumper setting (see calibration sheet), and
make sure that the valve connector has been fixed correctly (Controller only.) After applying power, wait at
least 35 minutes to allow the unit to warm up.
TROUBLE SHOOTING
SYMPTOM POSSIBLE CAUSE REMEDY
No signal 1a) No power Check power / wiring
1b) Electronic failure Return to factory
Controller indicates 2a) Liquid source is empty Check in-line filters, liquid
zero flow, regardless or blocked supply. Shut-off valve etc.
of command 2b) Supply pressure too high Lower supply pressure
or differential pressure too high
2c) VOR input is -15 to 0 Vdc Determine undesirable voltage
at VOR input
2d) Valve clogged Remove, clean and adjust orifice.
(valve voltage will increase See 6a.
to max.)
2e) Valve seat not compatible Choose correct valve seat
with liquid (valve voltage max.) material (consult factory)
2f) Electronic failure Return to factory
Output controller 3a) Pressure diff. too low/ Increase pressure diff., clean
much lower than in-line filter contaminated, filter/sensor/valve (6a)
setpoint sensor/valve clogged
d. Orifice disassembly
1. Use a screwdriver to remove the orifice through the process connection from the outlet body.
2. Take care of the o-ring.
3. Apply Nitrogen gas flow at 2 bar inlet pressure.
4. Screw the orifice in the outlet body and adjust till 0% output signal has been reached again.
5. Check if value opens at 5-7 Vdc. if not, adjust orifice (final turn: clock wise).
WARNING:
Service and troubleshooting should be performed only by personnel who have
been trained in
safe repair procedures who have thoroughly read this manual.
Section 4 Maintenance