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Flomega, liquid mfc’s/mfm’s – Brooks Instrument 5882/92 User Manual

Page 20

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20

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Flomega, Liquid MFC’s/MFM’s

Figure 3-4 Jumper Settings for Flomega

Figure 3-5 Jumper Settings for Flomega

Section 3 Theory of Operation

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