Brooks Instrument 5882/92 - Manual (Page 7)

7
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
1-1 Purpose
The Brooks models 5881/5882 Flow Controllers are a mass flow measurement devices designed for accu
rately measuring and controlling flows of liquids. This instruction manual is intended to provide the user
with all the information necessary to install, operate and maintain the Brooks 5881/5882 Mass Flow
Controllers and 5891/5892 Flow Meters. This manual is organized into six chapters:
1. Introduction
2. Installation
3. Operation
4. Maintenance
5. Replacement parts
6. Modellist
It is recommended that this manual be read in its entirety before attempting to operate or repair.
1-2 Description
The Brooks models 5881/5882 consist of three basic units: a flow sensor, a control valve and an integral
electronic control system. Designed to operate at +15 Vdc or +24 Vdc, the models 5881/5882 monitor
and maintain a stable mass flow relatively independent of pressure and temperature variations.
Standard features include:
a. Thru-flow (patented) design of the sensor
b. In-line type control valve
c. Soft start
d. Valve override
e. Low command valve inhibit
f. Flow output limiting
g. Temperature of heater output
h. Field adjustable orifice
1-3 Performance Specifications
Accuracy incl. linearity ± 0.5% full scale measured at calibration conditions
Process temperature effects ± 0.03% F.S./°C
Ambient temperature effects ± 0.1 % F.S./°C
Repeatability
Applicable flowrange
Models from 100% to 50% of max. f.s. less than 50% of max. f.s.
5881/91 ± 0.2% of rate ± 0.2% f.s.*
5882/92 ± 0.2% of rate ± 0.4% of rate
* The measured repeatability is (technically) limited by the current calibration method using an highly accurate
balance (weighscale)
Section 1 Introduction