Brooks Instrument 5882/92 - Manual (Page 5)

5
Installation and Operation Manual
X-TMF-FM-MFC-eng
PN 541-C-007-AAG
April, 2008
Flomega, Liquid MFC’s/MFM’s
Section 1 Introduction ............................................................................................................... 7
1-1 Purpose ............................................................................................................... 7
1-2 Description ............................................................................................................... 7
1-3 Specifications .............................................................................................................. 7
Section 2 Installation ............................................................................................................... 10
2-1 General ............................................................................................................... 10
2-2 Receipt of Equipment .................................................................................................. 10
2-3 Recommended Storage Practice ................................................................................. 10
2-4 Return Shipment .......................................................................................................... 11
2-5 Transit Precautions ...................................................................................................... 11
2-6 Removal from Storage ................................................................................................. 11
2-7 In-line Filter ............................................................................................................... 12
2-8 Connections ............................................................................................................... 12
2-9 Precision 5V Reference ............................................................................................... 12
2-10 Command Input ........................................................................................................... 12
2-11 Valve Override .............................................................................................................. 12
2-12 Installation ............................................................................................................... 14
2-13 Start-up Guidelines ...................................................................................................... 15
Section 3 Operation ............................................................................................................... 16
3-1 Theory of operation ...................................................................................................... 16
3-2 Calibration procedure ................................................................................................... 21
3-3 Response Adjustment ................................................................................................. 21
3-4 Rangeability ............................................................................................................... 21
Section 4 MAINTENANCE AND TROUBLE SHOOTING ............................................................. 22
4-1 General ............................................................................................................... 22
4-2 Disassembly and Assembly ........................................................................................ 22
4-3 Trouble shooting Guidelines ........................................................................................ 23
Section 5 PARTS LIST ............................................................................................................... 25
5-1 General ............................................................................................................... 25
5-2 Service Tools ............................................................................................................... 26
Section 6 Modellist ............................................................................................................... 27
Section 7 CE Certification ......................................................................................................... 28
Section 8 Safety Instructions .................................................................................................... 33
Appendix A ATEX Certification(EEx nA II T4) .............................................................................. 38
ATEX Certification (EEx d IIB T6...T4) ..................................................................... 39
Contents
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