Brooks Instrument 5861i - Manual (Page 7)

1-1
Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008
Brooks ® Model 5861 i
Section 1 Introduction
1-1 Purpose
The Brooks ® Model 5861 i Flowmeter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5861
i Mass Flow Meter. This manual is
organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5861
i.
1-2 Description
The Brooks Model 5861 i Mass Flowmeter is used widely in the
semiconductor, as well as many other industries where manual, electronic
or computer controlled gas handling occurs. The Model 5861
i consists of
two basic units: a flow sensor and an integral electronic signal conditioner.
This combination produces a stable gas flow indication which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures.
1-3 Specifications
Standard Ranges
10 slpm to 100 slpm* ( Nitrogen Equivalent), up to 200 slpm Hydrogen
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0° C and
101.3 kPa (760 Torr).
Accuracy
±1% full scale including linearity at calibration conditions;
68°F±3°F;50%±5%RH
Repeatability
0.25% of rate
Response Time (Flow Output Signal)
Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% flow step.