Brooks Instrument 5861i - Manual (Page 25)

4-1
Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008
Brooks ® Model 5861 i
Section 4 Maintenance
4-1 General
No routine maintenance is required on the Model 5861 i other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.
4-2 Troubleshooting
A. System Checks
The Model 5861 i is generally used as a component in gas handling
systems which can be quite complex. This can make the task of
isolating a malfunction in the system a difficult one. An incorrectly
diagnosed malfunction can cause many hours of unnecessary
downtime. If possible, make the following system checks before
removing a suspected defective mass flow controller for bench
troubleshooting or return, especially if the system is new:
1. Verify a low resistance common connection and that the correct power
supply voltage and signals are reaching and leaving the meter. The
Break-out Board (refer to Table 5-2) listed in section 5 , will make this
job much easier.