Brooks Instrument 5861i - Manual (Page 40)

5-4
Installation and Operation Manual
X-TMF-5861i-MFM-eng
Part Number: 541B111AAG
November, 2008
Brooks ® Model 5861 i
Section 5 Patrs List
5850 Series Service Tool Kit 5850/5860 Series Break Out Board Assembly
P/N S778D017AAA P/N S273Z668AAA for D Connector version
Permits the complete disassembly of the Installs directly between mass flow sensor/
Model 5861 i for servicing. controller and interconnecting cable. Allows
convenient access to all signals for easy
Contains: troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool 1 - Break Out PC Board
1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable
1 - Phillips Screw Driver 1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
5851 i/5861i Header Removal Tool
P/N S817Z036AAA
5861 i O-ring Kit
P/N S375Z334***
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown
Additional publications available:
MFC Contamination Control
Valve Application Guide/Service Manual
Table 5-2 Tool and Spare Part Kits for Model 5861i