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Brooks, Model 5861 i – Brooks Instrument 5861i User Manual

Page 20

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3-4

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B111AAG

November, 2008

Brooks

®

Model 5861

i

Section 3 Operation

Figure 3-2 Model 5861

i Calibration Connections

Figure 3-3 Adjustment Potentiometer Location

Figure 3-4 Fast Response Adjustment

*

*Note: Not used for a 5861

i