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Brooks, Model 5861 i – Brooks Instrument 5861i User Manual

Page 11

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2-3

Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008

Brooks

®

Model 5861

i

Section 2 Installation

Figure 2-1 Model 5861

i Dimensions

Figure 2-2 "D" Type Connector Pin Arrangement

PIN NO.

FUNCTION

COLOR CODE

1*

Set Point Return

Black

2

Voltage Signal Output

White

3

Not Used

4

Current Signal Output

Green

5

+15 to +28Vdc Supply

Orange

6

Not Used

7*

Current Set Point Input

Wht/Blk

8*

Voltage Set Point Input

Red/Blk

9

Supply Common

Grn/Blk

10

Signal Output Return

Org/Blk

11*

+5 Volt Reference Output

Blu/Blk

12*

Valve Override Input

Blk/Wht

13

Not Used

14

Chassis Ground

Grn/Wht

15

Not Used

* These connections are used for the 5850

i and 5851i Mass Flow Controllers.

Make no connections to these pins.

NOTE:

1. Cable shield tied to chassis ground in

meter connector. Make no connection
on customer end.

2. All power leads must be connected to

power supply.

Connection

"X" Dim.

1/4" Compression

5.17

Fitting

131

1/4" Tube VCO

4.71

120

1/4" Tube VCR

5.03

128

3/8" Compression

5.29

Fitting

134

3/8" or 1/2" Tube

5.15

VCO

131

3/8" or 1/2" Tube

5.33

VCR

135