Brooks Instrument 5861i - Manual (Page 12)

2-4
Installation and Operation Manual
X-TMF-5861i-MFM-eng
Part Number: 541B111AAG
November, 2008
Brooks ® Model 5861 i
Section 2 Installation
Recommended installation procedures:
a. The Model 5861 i should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5861 i Mass Flowmeter can be installed in any position.
However mounting orientations other than the original factory
calibration (see data sheet) will result in a ±0.5% maximum full scale
shift after re-zeroing.
e. When installing flowmeters, be aware that sharp abrupt angles in the
system piping directly upstream of the controller may cause a small
shift in accuracy. If possible have at least 10 pipe diameters of
straight tubing upstream of the Model 5861
i Mass Flowmeter.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
10-30 slpm 15 micron
Above 30 slpm 30 micron
Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.