INFICON Cube CDGsci - Manual (Page 3)

tina88e1-b (2014-09) 3
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDGsci series are intended for absolute pressure mea-
surement of gases in their respective pressure ranges.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in pro-
cess applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY
®
INFICON GmbH
VCR
®
Swagelok Marketing Co.
Cube™ INFICON GmbH
Windows CE Microsoft
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085