3 emulator specifications – INFICON Q-pod Thin Film Deposition Monitor User Manual
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Q-pod Operating Manual
4.3.3 Emulator Specifications
Dimensions
1.58 in. diameter x 1.79 in.
(40.13 mm diameter x 45.47 mm)
Temperature Range
0 to 50
o
C
Frequency
760-601-G2: 5.5 MHz ± 1 ppm at room temperature
Materials
304 Stainless Steel, Nylon, Teflon®, brass. Some internal components contain
zinc, tin, and lead.
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