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1 front load – INFICON Q-pod Thin Film Deposition Monitor User Manual

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Q-pod Operating Manual

4.2.1 Front Load

Follow the procedure below to replace the crystal in the Front Load sensor: (see

Figure 4-1

)

1

Gripping the crystal holder with your fingers, pull it straight out of the sensor
body.

2

Gently pry the crystal retainer from the holder (or use the Crystal Snatcher; see

Figure 4-6 on page 4-14

).

3

Turn the retainer over and the crystal will drop out.

4

Install a new crystal, with the patterned electrode face up.

5

Push the retainer back into the holder and replace the holder in the sensor
body.

Figure 4-1 Front Load Crystal Sensor (Exploded)

Front Load Crystal Holder

(IPN 750-172-G1)

Front Load Standard

Crystal Sensor Body

(IPN 750-207-G1)

Crystal (IPN 008-010-G10)

Fully Coated Face (Gold)

Finger Spring Contact

(IPN 750-171-P1)

Crystal Retainer

(IPN 007-023)

In-Vacuum Cable

To XIU

Water Tubes